@misc{1197221,
  author = {Michael T. Postek and Andras E. Vladar and Bin Ming and Benjamin Bunday},
  title = {Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy:},
  year = {2014},
  month = {2014-03-01 05:03:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.1170},
  language = {en},
}