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Discrepancies Between Roughness Measurements Obtained With Phase Shifting and White-Light Interferometry

Published

Author(s)

Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, Joseph Fu

Abstract

Discrepancies between phase shifting interferometry and white-light interferometry have been observed in step height and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two theoretical diffraction models are considered to explain the discrepancies.
Citation
Applied Optics
Volume
44
Issue
28

Keywords

interferometry, metrology, microscopy, phase shifting, roughness, step height, surface texture, white light

Citation

Rhee, H. , Vorburger, T. , Lee, J. and Fu, J. (2005), Discrepancies Between Roughness Measurements Obtained With Phase Shifting and White-Light Interferometry, Applied Optics (Accessed December 6, 2023)
Created October 1, 2005, Updated February 19, 2017