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Dimensional Metrology for Micro/Meso-Scale Manufacturing



Shawn P. Moylan


The small sizes, range of shapes and sizes, and low absolute tolerances present unique challenges to geometric dimensional metrology at the micro/meso-scale. This chapter provides and overview of the most common methods used for geometric dimensional metrology in three dimensions, focusing on processes that have readily available commercial equipment. These processes measure the surface of a part and are generally adapted from processes used for dimensional metrology at different size scales or processes used in fields outside manufacturing. The chapter discusses strengths, limitations, and challenges of processes from three categories: touch probe processes, optical processes, and scanning probe microscope processes. The high demands of metrology for micro/meso-scale parts and features means that trade offs almost always exist when selecting an appropriate metrology process. Development of hybrid processes that draw from strengths of multiple processes and overcome limitations of individual processes may help overcome trade offs. Additionally, on-machine metrology will likely have more significant benefit to the manufacture of micro/meso-scale parts and features.
Micromanufacturing Processes
Publisher Info
Taylor and Francis Group, Boca Raton, FL


micromanufacturing, micro-scale dimensional metrology, micro/meso-scale manufacturing, on-machine metrology


Moylan, S. (2012), Dimensional Metrology for Micro/Meso-Scale Manufacturing, Micromanufacturing Processes, Taylor and Francis Group, Boca Raton, FL, [online], (Accessed June 23, 2024)


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Created June 5, 2012, Updated February 19, 2017