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Dimensional Metrology with AFM

Published

Author(s)

T Mcwaid, J Schneir, Ronald G. Dixson, V W. Tsai

Abstract

Abstract not available.
Proceedings Title
Program of 2nd Industrial Applications of Scanned Probe Microscopy; NIST
Conference Location
Gaithersburg, MD, USA

Citation

Mcwaid, T. , Schneir, J. , Dixson, R. and Tsai, V. (2005), Dimensional Metrology with AFM, Program of 2nd Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, USA (Accessed December 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2004, Updated October 12, 2021