TY  - CONF
AU  - T Mcwaid
AU  - J Schneir
AU  - Ronald Dixson
AU  - V Tsai
C2  - Program of 2nd Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, USA
DA  - 2005-01-01 00:01:00
LA  - en
PB  - Program of 2nd Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, USA
PY  - 2005
TI  - Dimensional Metrology with AFM
ER  -