@conference{772301,
  author = {T Mcwaid and J Schneir and Ronald Dixson and V Tsai},
  title = {Dimensional Metrology with AFM},
  year = {2005},
  month = {2005-01-01 00:01:00},
  publisher = {Program of 2nd Industrial Applications of Scanned Probe Microscopy; NIST, Gaithersburg, MD, USA},
  language = {en},
}