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Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers



Robert G. Downing, David S. Simons, George P. Lamaze, Richard M. Lindstrom, Robert R. Greenberg, Rick L. Paul, Susannah B. Schiller, William F. Guthrie
Journal of Vacuum Science and Technology
Created November 1, 2007, Updated February 17, 2017