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Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers

Published

Author(s)

Robert G. Downing, David S. Simons, George P. Lamaze, Richard M. Lindstrom, Robert R. Greenberg, Rick L. Paul, Susannah B. Schiller, William F. Guthrie
Citation
Journal of Vacuum Science and Technology

Citation

Downing, R. , Simons, D. , Lamaze, G. , Lindstrom, R. , Greenberg, R. , Paul, R. , Schiller, S. and Guthrie, W. (2007), Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers, Journal of Vacuum Science and Technology (Accessed July 14, 2024)

Issues

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Created November 1, 2007, Updated February 17, 2017