@article{68221,
  author = {Robert Downing and David Simons and George Lamaze and Richard Lindstrom and Robert Greenberg and Rick Paul and Susannah Schiller and William Guthrie},
  title = {Development of Certified Reference Materials of Ion-Implanted Dopants in Silicon for Calibration of Secondary Ion Mass Spectrometers},
  year = {2007},
  month = {2007-11-01},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}