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The Development and Evaluation of TiO2 Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms

Published

Author(s)

Kurt D. Benkstein, Christopher B. Montgomery, Mark D. Vaudin, Stephen Semancik
Proceedings Title
Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society
Volume
828
Conference Dates
November 29-December 2, 2004
Conference Title
Materials Research Society Symposium Proceedings

Keywords

conductometric gas sensor, nanoparticle, porous film, TiO2

Citation

Benkstein, K. , Montgomery, C. , Vaudin, M. and Semancik, S. (2005), The Development and Evaluation of TiO<sub>2</sub> Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms, Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society (Accessed June 20, 2024)

Issues

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Created January 1, 2005, Updated February 17, 2017