@conference{183881,
  author = {Kurt Benkstein and Christopher Montgomery and Mark Vaudin and Stephen Semancik},
  title = {The Development and Evaluation of TiO<sub>2</sub> Nanoparticle Films for Conductometric Gas Sensing on MEMS Microhotplate Platforms},
  year = {2005},
  number = {828},
  month = {2005-01-01},
  publisher = {Semiconductor Materials for Sensing, Symposium on | | Semiconductor Materials for Sensing | Materials Research Society},
  language = {en},
}