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PUBLICATIONS

Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match

Published

Author(s)

R C. Hedden, Barry J. Bauer, Hae-Jeong Lee, Wen-Li Wu

Abstract

Much of the recent developmental efforts in low-k dielectrics involve production of nanoporous thin films. By using synthetic technicques that leave nanometer-sized (
Citation
Polymer Preprints
Pub Type
Journals

Keywords

contrast match, low-k, porous thin films, SANS

Citation

Hedden, R. , Bauer, B. , Lee, H. and Wu, W. (2002), Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match, Polymer Preprints (Accessed October 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 1, 2002, Updated February 17, 2017
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