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PUBLICATIONS

Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match

Published

Author(s)

R C. Hedden, Barry J. Bauer, Hae-Jeong Lee, Wen-Li Wu

Abstract

Much of the recent developmental efforts in low-k dielectrics involve production of nanoporous thin films. By using synthetic technicques that leave nanometer-sized (
Citation
Polymer Preprints
Pub Type
Journals

Keywords

contrast match, low-k, porous thin films, SANS

Citation

Hedden, R. , Bauer, B. , Lee, H. and Wu, W. (2002), Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match, Polymer Preprints (Accessed December 4, 2023)

Created March 1, 2002, Updated February 17, 2017