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Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match
Published
Author(s)
R C. Hedden, Barry J. Bauer, Hae-Jeong Lee, Wen-Li Wu
Abstract
Much of the recent developmental efforts in low-k dielectrics involve production of nanoporous thin films. By using synthetic technicques that leave nanometer-sized (
Citation
Polymer Preprints
Pub Type
Journals
Keywords
contrast match, low-k, porous thin films, SANS
Citation
Hedden, R.
, Bauer, B.
, Lee, H.
and Wu, W.
(2002),
Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match, Polymer Preprints
(Accessed December 4, 2023)