Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match

Published

Author(s)

R C. Hedden, Barry J. Bauer, Hae-Jeong Lee, Wen-Li Wu

Abstract

Much of the recent developmental efforts in low-k dielectrics involve production of nanoporous thin films. By using synthetic technicques that leave nanometer-sized (
Citation
Polymer Preprints

Keywords

contrast match, low-k, porous thin films, SANS

Citation

Hedden, R. , Bauer, B. , Lee, H. and Wu, W. (2002), Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match, Polymer Preprints (Accessed July 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 1, 2002, Updated February 17, 2017