Hedden, R.
, Bauer, B.
, Lee, H.
and Wu, W.
(2002),
Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match, Polymer Preprints (Accessed October 16, 2026)
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Determination of Closed Pore Content in Nanoporous Films by SANS Contrast Match
Published
Author(s)
, , ,
Abstract
Much of the recent developmental efforts in low-k dielectrics involve production of nanoporous thin films. By using synthetic technicques that leave nanometer-sized (Citation
Polymer Preprints
Pub Type
Journals
Keywords
contrast match, low-k, porous thin films, SANS
Citation
Issues
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Created March 1, 2002, Updated February 17, 2017