This paper presents an analysis tool and design method forMEMS parallel mechanisms. Due to processing constraints inMEMS fabrication, flexure joints are frequently used in MEMSmechanisms. Flexure joints offer advantages over other joint designdue to their monolithic characteristics. They can be usedto reduce the size of manipulators or to increase the precisionof motion. Their inherent flexibility, however, also results in taskspace compliance which needs to be carefully designed to matchthe task specification. This paper presents an analysis and designtool for such mechanisms by using the differential kinematics.Performance metrics are chosen based on manipulability andtask stiffness matrices, which in turn are used in a multi-objectiveoptimization. As an illustrative example, a 1-DOF MEMS parallelmechanism based on the macro- and meso-scale modelsdesigned by NIST is considered with several choices of performancemetrics and design variables. The resulting designs aresuccessfully fabricated using DRIE process.
Proceedings Title: Proceedings of ASME Design Engineering Technical Conferences
Conference Dates: September 28-October 2, 2004
Conference Location: Salt Lake City, UT
Conference Title: ASME Design Engineering Technical Conference
Pub Type: Conferences
flexure, MEMS, optimization, parallel mechanism