Design of a MEMS force sensor for quantitative measurement in the nano- to piconewton range
John M. Moreland
We describe the design and fabrication of a MEMS based force sensor with SI traceability for measurement of forces from a few nanonewtons down to 200 piconewtons. The sensor is based on the same principles of operation as the larger-scale Electrostatic Force Balance at NIST. It consists of a silicon rigid arm supported on tethers, two sets of capacitive electrodes for electrostatic actuation and capacitance gradient sensing, and a fiber optic Fabry-Perot cavity interferometer with a demonstrated displacement resolution of 2 picometers. We describe the design of the sensors kinematic stage and its theoretical performance metrics.
Proceedings of the MEMS & Microsystems Topical Workshop, 6th International Conference & Exhibition on Device Packaging, Scottsdale, AZ