@conference{213031,
  author = {John Moreland},
  title = {Design of a MEMS force sensor for quantitative measurement in the nano- to piconewton range},
  year = {2010},
  number = {2010},
  month = {2010-01-01},
  publisher = {Proceedings of the MEMS & Microsystems Topical Workshop, 6th International Conference & Exhibition on Device Packaging, Scottsdale, AZ, Scottsdale, AZ},
  doi = {https://doi.org/10.4071/2010DPC-wp23},
  language = {en},
}