Design and Spectroscopic Reflectometry Characterization of Pulsed Laser Deposition Combinatorial Libraries

Published

January 22, 2007

Author(s)

Peter K. Schenck, Nabil Bassim, Makoto Otani, Hiroyuki Oguchi, Martin L. Green

Abstract

The goal of the design of pulsed laser deposition (PLD) combinatorial library films is to optimize the compositional coverage of the films while maintaining a uniform thickness. The deposition pattern of excimer laser PLD films can be modeled with a bimodal cosn distribution. Deposited films were characterized using a spectroscopic reflectometer (250-1000 nm) to map the thickness of both single composition calibration films and combinatorial library films. These distribution functions were used to simulate the composition and thickness of multiple target combinatorial library films. The simulations were correlated with electron-probe microanalysis wavelength-dispersive spectroscopy (EPMA-WDS) composition maps. The composition and thickness of the library films can be fine-tuned by adjusting the laser spot size, fluence, background gas pressure, target geometry and other processing parameters which affect the deposition pattern. Results from compositionally graded combinatorial library films of the ternary system Al2O3-HfO2-Y2O3 are discussed.

Citation

Applied Surface Science

Volume

254

Issue

3

Pub Type

Journals

Keywords

combinatorial, reflectometry, thin films

Citation

Schenck, P. , Bassim, N. , Otani, M. , Oguchi, H. and Green, M. (2007), Design and Spectroscopic Reflectometry Characterization of Pulsed Laser Deposition Combinatorial Libraries, Applied Surface Science (Accessed October 20, 2025)