@article{93581, author = {Peter Schenck and Nabil Bassim and Makoto Otani and Hiroyuki Oguchi and Martin Green}, title = {Design and Spectroscopic Reflectometry Characterization of Pulsed Laser Deposition Combinatorial Libraries}, year = {2007}, number = {254}, month = {2007-01-22}, publisher = {Applied Surface Science}, language = {en}, }