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Design and Fabrication of Thin-Film Multijunction Thermal Converters at NIST and Sandia National Laboratories

Published

Author(s)

Thomas E. Lipe Jr., Joseph R. Kinard Jr., Thomas F. Wunsch, Ronald R. Manginell

Abstract

Abstract - We report on the results of a collaborative effort between the National Institute of Standards and Technology and Sandia National Laboratories to design, fabricate, and test multijunction thermal converters (MJTCs) based on thin-film technology. These devices are specifically intended for the measurement of ac current and voltage using ac-dc transfer techniques, but have many other possible applications, including the direct measurement of electrical quantities, the measurement of gas flow, and the measurement of vacuum and leak rates. The paper will provide descriptions of the motivation for the project, the design and fabrications of the MJTCs, the electrical and physical properties of the MJTCs and results on the devices produced by the collaboration.
Proceedings Title
Tech. Dig., 2002 Workshop on Nano and Microsystems Technology
Conference Dates
December 4-5, 2002
Conference Location
Huntsville, AL, USA

Keywords

thermal current converter, thermal transfer standard, ac-dc difference, deep reactive ion etching

Citation

Lipe Jr., T. , Kinard Jr., J. , Wunsch, T. and Manginell, R. (2002), Design and Fabrication of Thin-Film Multijunction Thermal Converters at NIST and Sandia National Laboratories, Tech. Dig., 2002 Workshop on Nano and Microsystems Technology, Huntsville, AL, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30906 (Accessed June 17, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 30, 2002, Updated October 12, 2021