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Defects involved in TDDB-stressed SiC MOSFET

Published

Author(s)

Cooper Voigt, Stephen Moxim, Jason Campbell, Akin Akturk, Jason Ryan

Abstract

We report electrically-detected magnetic resonance, electron spin resonance, charge pumping and transfer characteristics of SiC lateral MOSFETs before and after accelerated TDDB stress at 9 MV/cm field. The different responses measured via each technique provide insight to the rich interplay between defect creation and defect charging that underlies dynamic reliability responses of these devices.
Conference Dates
October 5-9, 2025
Conference Location
South Lake Tahoe, CA, US
Conference Title
2025 IEEE International Integrated Reliability Workshop (IIRW)

Keywords

SiC, MOSFET, Reliability, SDCP, CP

Citation

Voigt, C. , Moxim, S. , Campbell, J. , Akturk, A. and Ryan, J. (2026), Defects involved in TDDB-stressed SiC MOSFET, 2025 IEEE International Integrated Reliability Workshop (IIRW), South Lake Tahoe, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=960620 (Accessed October 6, 2026)
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Issues

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Created April 28, 2026, Updated October 5, 2026
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