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Defect Formation Mechanisms in Low Dose SIMOX Material

Published

Author(s)

S. Bagchi, J. H. Lee, S. J. Krause, Peter Roitman
Proceedings Title
Proc., Electrochemical Society International Symposium on SOI Technology and Devices
Volume
96-3
Issue
6
Conference Dates
May 5-10, 1996
Conference Location
Los Angeles, CA, USA

Citation

Bagchi, S. , Lee, J. , Krause, S. and Roitman, P. (1996), Defect Formation Mechanisms in Low Dose SIMOX Material, Proc., Electrochemical Society International Symposium on SOI Technology and Devices, Los Angeles, CA, USA (Accessed June 25, 2024)

Issues

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Created December 30, 1996, Updated October 12, 2021