TY  - CONF
AU  - Bagchi, S.
AU  - Lee, J.
AU  - Krause, S.
AU  - Roitman, Peter
C2  - Proc., Electrochemical Society International Symposium on SOI Technology and Devices, Los Angeles, CA, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 96-3
PB  - Proc., Electrochemical Society International Symposium on SOI Technology and Devices, Los Angeles, CA, USA
PY  - 1996
TI  - Defect Formation Mechanisms in Low Dose SIMOX Material
ER  -