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Cryopump Vibration Isolation System for an SEM

Published

Author(s)

Michael T. Postek, William J. Keery
Citation
Scanning Microscopy
Volume
404-409 (June 25

Citation

Postek, M. and Keery, W. (1991), Cryopump Vibration Isolation System for an SEM, Scanning Microscopy (Accessed June 3, 2023)
Created December 30, 1991, Updated October 12, 2021