@article{768201,
  author = {Michael Postek and William Keery},
  title = {Cryopump Vibration Isolation System for an SEM},
  year = {1991},
  number = {404-409 (June 25},
  month = {1991-12-31 00:12:00},
  publisher = {Scanning Microscopy},
  language = {en},
}