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Critical Dimension Metrology for MEMS Processes Using Electrical Techniques

Published

Author(s)

Richard A. Allen, Janet M. Cassard
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II 2880
Issue
158
Conference Location
Undefined

Citation

Allen, R. and Cassard, J. (1996), Critical Dimension Metrology for MEMS Processes Using Electrical Techniques, Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II 2880, Undefined (Accessed April 22, 2024)
Created December 30, 1996, Updated October 12, 2021