TY - CONF AU - Richard Allen AU - Janet Cassard C2 - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II 2880, Undefined DA - 1996-12-31 00:12:00 LA - en PB - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II 2880, Undefined PY - 1996 TI - Critical Dimension Metrology for MEMS Processes Using Electrical Techniques ER -