Recent advances in nanotechnology have yielded new materials and structures that offer great potential for improving sensitivity, selectivity and stability of the next generation of chemical gas sensors. To successfully fabricate practical devices, the bottom-up approach of producing nanoscale sensing elements must be integrated with the top-down methodology currently dominating microtechnology. In this letter, we show this principle in practice via the coupling of a single-crystal SnO2 nanowire sensing element with a MEMS microhotplate gas sensor platform. The sensing results obtained using this prototype sensor demonstrate its encouraging performance featuring reduced operation temperature and power, great stability, excellent sensitivity, and promising ways to improve selectivity.
Citation: Applied Physics Letters
Pub Type: Journals