Kang, S.
, Prabhu, V.
, Vogt, B.
, Lin, E.
, Wu, W.
and Turnquest, K.
(2006),
Copolymer Fraction Effect on Acid Catalyzed Deprotection Reaction Kinetics in Model 193 nm Photoresists, Proceedings of SPIE , San Jose, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852598
(Accessed April 24, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Copolymer Fraction Effect on Acid Catalyzed Deprotection Reaction Kinetics in Model 193 nm Photoresists
Published
Author(s)
, , , , , Karen Turnquest
Abstract
A correlation between polymer molecular structure and acid catalyzed kinetics is demonstrated by a binary copolymer photoresists system which includes an acid-liable and an acid-inert species. It was found that the acid catalyzed deprotection kinetics significantly depends on the non-reactive comonomer in the polymer chain, i.e. the apparent reaction rate constant monotonically decreases as this comonomer composition is increased. The phenomena are interpreted as the reduction of diffusivity of photoacid in the polymer matrix through its hydrogen bonding interaction with the polar group in the inert comonomer. Additionally, the hydrogen bonding interaction existing between photoacid and reaction byproduct is expected to be the main reason to account for the acid loss or trapping effect observed by various researchers.Proceedings Title
Proceedings of SPIE
Volume
6153
Conference Dates
February 19-24, 2006
Conference Location
San Jose, CA, US
Conference Title
SPIE Advanced Lithography
Pub Type
Conferences
Download Paper
Keywords
copolymer, diffusion, fourier transform infrared spectroscopy, photoacid, photolithography, photoresists, reaction rate constant
Citation
Created February 18, 2006, Updated October 12, 2021