@conference{836961,
  author = {Shuhui Kang and Vivek Prabhu and B Vogt and Eric Lin and Wen-Li Wu and Karen Turnquest},
  title = {Copolymer Fraction Effect on Acid Catalyzed Deprotection Reaction Kinetics in Model 193 nm Photoresists},
  year = {2006},
  number = {6153},
  month = {2006-02-19 00:02:00},
  publisher = {Proceedings of SPIE , San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852598},
  language = {en},
}