Contact Resistance of Flexible, Transparent Carbon Nanotube Films with Metals
Hua Xu, Lei Chen, Liangbing Hu, Nikolai B. Zhitenev
We studied the contact properties of different metals to flexible optically-transparent single-walled carbon nanotube (SWCNTs) films. The SWCNT films are deposited on flexible polyethylene terephthalate (PET) substrate and patterned in test structures optimized for contact resistance measurements for a particular metal contact. Specific contact resistance and current transfer length is determined for Pt, Cr, Cu and Au contacts. We also evaluate effects of chemical doping and thickness of SWCNT films on the contact resistance.
, Chen, L.
, , L.
and Zhitenev, N.
Contact Resistance of Flexible, Transparent Carbon Nanotube Films with Metals, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905854
(Accessed December 4, 2021)