Contemporary circuit designers are requiring larger bandwidths from microsystems to accomodate the ever-increasing demand for denser content. The electrical performance of these microsystems is intrisically related to the electromagnetic properties of the materials. Methods using the Fabry-Perot resonator (FPR) have found widespread use in systems developed for measuring material properties at millimeter wave frequencies. This paper will provide a brief overview of the theory and methodology of Fabry-Perot resonators and present measurements of selected materials made with the FPR system currently in use at the National Institute of Standards and Technology (NIST).
Conference Dates: April 23-26, 2007
Conference Location: Denver, CO
Conference Title: IMAPS/ACerS 3rd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies
Pub Type: Conferences
complex permittivity, Fabry-Perot resonator, millimeter waves