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Compensation for Substrate Permittivity in Probe-Tip Calibration



Dylan F. Williams, Roger Marks


We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
December 1-2, 1994
Conference Location
Boulder, CO


Williams, D. and Marks, R. (1994), Compensation for Substrate Permittivity in Probe-Tip Calibration, Tech Dig., Auto. RF Tech. Group Conf., Boulder, CO, [online], (Accessed May 30, 2024)


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Created December 1, 1994, Updated November 10, 2018