Compensation for Substrate Permittivity in Probe-Tip Calibration
Dylan F. Williams, Roger Marks
We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.
and Marks, R.
Compensation for Substrate Permittivity in Probe-Tip Calibration, Tech Dig., Auto. RF Tech. Group Conf., Boulder, CO, [online], https://doi.org/10.1109/ARFTG.1994.327077
(Accessed December 9, 2023)