Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Comparison of On-Wafer Calibrations



Dylan F. Williams, Roger Marks, A. Davidson


A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance, reference plane offset, and the worst-case measurement deviations of any calibration from a benchmark calibration. The technique is applied to several popular on-wafer scattering parameter calibrations, and the deviations between those calibrations and the thru-reflect line calibration are quantified.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Location
San Diego, CA


Williams, D. , Marks, R. and Davidson, A. (1991), Comparison of On-Wafer Calibrations, Tech Dig., Auto. RF Tech. Group Conf., San Diego, CA, [online], (Accessed April 16, 2024)
Created December 1, 1991, Updated November 10, 2018