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Comparative Study of Pore Size of Low-Dielectric-Contant Porous Spin-on-Glass Films with Different Ways of Non-destructive Instrumentation

Published

Author(s)

E Kondoh, M R. Baklanov, Eric K. Lin, D W. Gidley, A Nakashima
Citation
Japanese Journal of Applied Physics
Volume
40

Keywords

Electronic Materials, Microstructure, Nanostructured Materials, Reflectivity, Scattering, Thin Films, ellipsometry, low-dielectric-constant thin films, neutron scattering, pore size distribution, positron annihilation

Citation

Kondoh, E. , Baklanov, M. , Lin, E. , Gidley, D. and Nakashima, A. (2001), Comparative Study of Pore Size of Low-Dielectric-Contant Porous Spin-on-Glass Films with Different Ways of Non-destructive Instrumentation, Japanese Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853771 (Accessed April 20, 2024)
Created December 31, 2000, Updated October 12, 2021