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Compact Force Sensors for Low-Force Mechanical Probe Calibration

Published

Author(s)

Jon R. Pratt, Douglas T. Smith, S Woody

Abstract

The loading mechanisms of instrumented indentation machines are often calibrated using deadweights. In many cases, due to the geometry of the loading frame, the applied deadweight is tensile, while the indentation leads to be measured are compressive. In this paper, we report preliminary efforts to develop a compressive load cell for use on a typical instrumented indentation machine. Two devices were evaluated, one a compact capacitance-based device fabricated a NIST, the other a commercial piezoresistive force sensor. We will describe the calibration sensitivity, stability and drift of each, and discuss the force sensor. We will describe the calibration sensitivity, stability and drift of each, and discuss the potential use of each as a force transfer artifact for the calibration of instrumented indenters.
Proceedings Title
IMEKO TC3/TC5/TC20 - VDI-BERICHTE 1685
Conference Dates
September 24-25, 2002
Conference Location
Celle, 1, GE
Conference Title
11th Conference on Hardness Measurement
Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the age of globalization

Keywords

atomic force microscopy, force metrology, indentation, load cell, nanoindentation

Citation

Pratt, J. , Smith, D. and Woody, S. (2002), Compact Force Sensors for Low-Force Mechanical Probe Calibration, IMEKO TC3/TC5/TC20 - VDI-BERICHTE 1685, Celle, 1, GE (Accessed April 17, 2024)
Created August 31, 2002, Updated October 12, 2021