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Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO2 for the Advanced Gate Stack

Published

Author(s)

K S. Chang, Martin L. Green, John S. Suehle, Eckhard Vogel, Hao Xiong, Jason Hattrick-Simpers, Ichiro Takeuchi, O Famodu, K Ohmori, P Ahmet, T Chikyow, Prashant Majhi, B -. Lee
Citation
Applied Physics Letters
Volume
89
Issue
14

Citation

Chang, K. , Green, M. , Suehle, J. , Vogel, E. , Xiong, H. , Hattrick-Simpers, J. , Takeuchi, I. , Famodu, O. , Ohmori, K. , Ahmet, P. , Chikyow, T. , Majhi, P. and Lee, B. (2006), Combinatorial Study of Ni-Ti-Pt Ternary Metal Gate Electrodes on HfO2 for the Advanced Gate Stack, Applied Physics Letters (Accessed March 4, 2024)
Created October 1, 2006, Updated October 12, 2021