A Coarse/Fine Motion Control Stage; Preliminary Studies
H Yang, E S. Buice, T J. Fagan, Stephen J. Smith, R Hocken, D L. Trumper, Richard Seugling
We are developing a stage system, which uses a coarse/fine approach for accurate nanometer level positioning for scanning specimens over an area measuring 50 mm ? 50 mm. The completed system will comprise a short-range, 6 degree-of-freedom fine-motion platform (10 mm, 40 microradians) carried by a long-range, two-axis X-Y coarse positioning system, to achieve nanometer resolution positioning. Motion of the platform relative to a measurement frame will be measured using a heterodyne laser interferometer. The complete system will be housed in a vacuum system, pumped to better than 10-3 Torr, and operated in a temperature-controlled laboratory. Prior to manufacture of this complete system, a number of conerns such as, vacuum system design, nanometer precision bearings, controller strategy and interferometer configuration must be addressed. Currently, we are developing controller algorithms and implementation strategies. As a first step to assess a cascaded controller, a considerably simpler, single-axis, coarse/fine stage has been design and manufactured. This system will be interfaced with a custom-built, DSP-based controller based around a dSPACE TM architecture described herein. As well as some controller implementation strategies and considerations, results from preliminary tests on this system will be presented.
, Buice, E.
, Fagan, T.
, Smith, S.
, Hocken, R.
, Trumper, D.
and Seugling, R.
A Coarse/Fine Motion Control Stage; Preliminary Studies, ASPE 19th Annual Meeting, Orlando, FL, USA
(Accessed November 30, 2023)