@conference{840971,
  author = {H Yang and E Buice and T Fagan and Stephen Smith and R Hocken and D Trumper and Richard Seugling},
  title = {A Coarse/Fine Motion Control Stage; Preliminary Studies},
  year = {2004},
  month = {2004-10-01 00:10:00},
  publisher = {ASPE 19th Annual Meeting, Orlando, FL, USA},
  language = {en},
}