A simple instrument for automatically controlling the deposition rate of an electronbeam evaporator is described. The design incorporates a commercially available, microprocessor based, Proportional-Integral-Differential (PID) process controller which provides loop control and automatic determination of optimal proportional, integral and differential loop constants. A logarithmic amplifier is used to linearize the overall loop response. The controller is used in conjunction with a compact electron-beam heated evaporator.
Citation: Review of Scientific Instruments
Pub Type: Journals