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On-Chip Electrostatic Discharge Protection for CMOS Gas Sensor Systems-on-a-Chip (SoC)



Javier Salcedo, Juin J. Liou, Muhammad Y. Afridi, Allen R. Hefner Jr.


An on-chip Electrostatic Discharge (ESD) protection scheme is demonstrated for MicroElectroMechanical Systems (MEMS)-based Embedded Sensor (ES) System-on-a-Chip (SoC). The ESD protection scheme is implemented with ground-referenced multifinger thyristor-type devices optimized for 1) the Input/Output (I/O) protection, 2) the power supply clamp, and 3) the protection at the internal sensors? electrodes during the micromachining process. The ESD protection structure shows a low leakage current in the order of 10-11 Amps at the SoC operating voltage, and high on-state conductance I-V characteristics for bipolar ESD protection.
Microelectronics Reliability


Electrostatic Discharge (ESD), Gas Sensor System on-a-Chip (SoC), MicroElectroMechanical Systems (MEMS), Thyristor.


Salcedo, J. , Liou, J. , Afridi, M. and Hefner, A. (2006), On-Chip Electrostatic Discharge Protection for CMOS Gas Sensor Systems-on-a-Chip (SoC), Microelectronics Reliability (Accessed May 21, 2024)


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Created August 1, 2006, Updated January 27, 2020