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Chemistry of arsenic incorporation during GaAs/GaAs(100) molecular beam epitaxy probed by simultaneous laser flux monitoring and reflection high-energy electron diffraction

Published

Author(s)

A K. Ott, S A. Casey, A L. Alstrin, S R. Leone
Citation
Journal of Vacuum Science and Technology B
Volume
14

Citation

Ott, A. , Casey, S. , Alstrin, A. and Leone, S. (1996), Chemistry of arsenic incorporation during GaAs/GaAs(100) molecular beam epitaxy probed by simultaneous laser flux monitoring and reflection high-energy electron diffraction, Journal of Vacuum Science and Technology B (Accessed April 24, 2024)
Created December 31, 1995, Updated October 12, 2021