@article{799661, author = {A Ott and S Casey and A Alstrin and S Leone}, title = {Chemistry of arsenic incorporation during GaAs/GaAs(100) molecular beam epitaxy probed by simultaneous laser flux monitoring and reflection high-energy electron diffraction}, year = {1996}, number = {14}, month = {1996-01-01 00:01:00}, publisher = {Journal of Vacuum Science and Technology B}, language = {en}, }