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Chemical mapping of patterned polymer photoresists by near-field infrared microsopy

Published

Author(s)

B Dragnea, Jan Preusser, J M. Szarko, L A. McDonough, S R. Leone
Citation
Proc ICSFS-10 Appl Surf Sci
Volume
175

Citation

Dragnea, B. , Preusser, J. , Szarko, J. , McDonough, L. and Leone, S. (2001), Chemical mapping of patterned polymer photoresists by near-field infrared microsopy, Proc ICSFS-10 Appl Surf Sci (Accessed April 22, 2024)
Created December 31, 2000, Updated October 12, 2021