Dragnea, B.
, Preusser, J.
, Szarko, J.
, McDonough, L.
and Leone, S.
(2001),
Chemical mapping of patterned polymer photoresists by near-field infrared microsopy, Proc ICSFS-10 Appl Surf Sci
(Accessed May 31, 2023)
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Chemical mapping of patterned polymer photoresists by near-field infrared microsopy
Published
Author(s)
B Dragnea, , J M. Szarko, L A. McDonough,
Citation
Proc ICSFS-10 Appl Surf Sci
Volume
175
Pub Type
Journals
Citation
Created December 31, 2000, Updated October 12, 2021