@article{826581,
  author = {B Dragnea and Jan Preusser and J Szarko and L McDonough and S Leone},
  title = {Chemical mapping of patterned polymer photoresists by near-field infrared microsopy},
  year = {2001},
  number = {175},
  month = {2001-01-01 00:01:00},
  publisher = {Proc ICSFS-10 Appl Surf Sci},
  language = {en},
}