NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Chemical Compositional Mapping by Microbeam Analysis at the Micrometer Scale and Finer

Published

Author(s)

Dale E. Newbury
Citation
Microelectronics Journal
Volume
28
Issue
4
Pub Type
Journals

Citation

Newbury, D. (1997), Chemical Compositional Mapping by Microbeam Analysis at the Micrometer Scale and Finer, Microelectronics Journal (Accessed October 8, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 1, 1997, Updated February 17, 2017
Was this page helpful?