TY  - JOUR
AU  - Dale Newbury
C2  - Microelectronics Journal
DA  - 1997-12-01
LA  - en
M1  - 28
PB  - Microelectronics Journal
PY  - 1997
TI  - Chemical Compositional Mapping by Microbeam Analysis at the Micrometer Scale and Finer
ER  -