Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Characterization of Two-Dimensional Dopant Profiles: Status and Review

Published

Author(s)

Alain C. Diebold, M. Kump, Joseph Kopanski, David G. Seiler
Citation
Journal of Vacuum Science and Technology
Volume
B 14
Issue
1

Citation

Diebold, A. , Kump, M. , Kopanski, J. and Seiler, D. (1996), Characterization of Two-Dimensional Dopant Profiles: Status and Review, Journal of Vacuum Science and Technology (Accessed March 3, 2024)
Created January 31, 1996, Updated October 12, 2021