Diebold, A.
, Kump, M.
, Kopanski, J.
and Seiler, D.
(1996),
Characterization of Two-Dimensional Dopant Profiles: Status and Review, Journal of Vacuum Science and Technology
(Accessed May 31, 2023)
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Characterization of Two-Dimensional Dopant Profiles: Status and Review
Published
Author(s)
Alain C. Diebold, M. Kump, ,
Citation
Journal of Vacuum Science and Technology
Volume
B 14
Issue
1
Pub Type
Journals
Citation
Created January 31, 1996, Updated October 12, 2021