@article{794536,
  author = {Alain Diebold and M. Kump and Joseph Kopanski and David Seiler},
  title = {Characterization of Two-Dimensional Dopant Profiles: Status and Review},
  year = {1996},
  number = {B 14},
  month = {1996-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}