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Characterization of the Latent Image to Developed Image in Model EUV Photoresists

Published

Author(s)

John T. Woodward IV, Kwang-Woo Choi, Vivek Prabhu, Shuhui Kang, Kristopher Lavery, Wen-Li Wu, Michael Leeson, Anuja De Silva, Nelson Felix, Christopher K. Ober

Abstract

Current extreme ultraviolet (EUV) photoresist materials do not yet meet exposure-dose sensitivity, line-width roughness, and resolution requirements. In order to quantify how trade-offs are related to the materials properties of the resist and processing conditions, advanced measurements and fundamental studies are required that consider EUV-resist specific problems. In this paper, we focus on the correlations between the latent image and developed image in EUV exposed line/space features. The latent image of isolated lines produced by EUV lithography are characterized by atomic force microscopy through the change in topology caused by change in film thickness that occurs upon deprotection. The resulting latent-image deprotection gradient, based on line cross-sections, and latent-image line-width roughness provide metrics and insight into ways to optimize the lithographic process. The results from a model polymer and molecular resist show the general applicability of the metric before development.
Proceedings Title
Proceedings of SPIE
Volume
6923
Conference Dates
February 22-27, 2008
Conference Location
San Jose, CA, US
Conference Title
SPIE Advanced Lithography

Keywords

chemically amplified photoresists, molecular glass, photolithography, spin diffusion

Citation

Woodward IV, J. , Choi, K. , Prabhu, V. , Kang, S. , Lavery, K. , Wu, W. , Leeson, M. , De Silva, A. , Felix, N. and Ober, C. (2008), Characterization of the Latent Image to Developed Image in Model EUV Photoresists, Proceedings of SPIE, San Jose, CA, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853583 (Accessed July 25, 2024)

Issues

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Created February 21, 2008, Updated October 12, 2021