@conference{823446,
  author = {John Woodward IV and Kwang-Woo Choi and Vivek Prabhu and Shuhui Kang and Kristopher Lavery and Wen-Li Wu and Michael Leeson and Anuja De Silva and Nelson Felix and Christopher Ober},
  title = {Characterization of the Latent Image to Developed Image in Model EUV Photoresists},
  year = {2008},
  number = {6923},
  month = {2008-02-22 00:02:00},
  publisher = {Proceedings of SPIE, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853583},
  language = {en},
}