TY  - CONF
AU  - John Woodward IV
AU  - Kwang-Woo Choi
AU  - Vivek Prabhu
AU  - Shuhui Kang
AU  - Kristopher Lavery
AU  - Wen-Li Wu
AU  - Michael Leeson
AU  - Anuja De Silva
AU  - Nelson Felix
AU  - Christopher Ober
C2  - Proceedings of SPIE, San Jose, CA, US
DA  - 2008-02-22 00:02:00
LA  - en
M1  - 6923
PB  - Proceedings of SPIE, San Jose, CA, US
PY  - 2008
TI  - Characterization of the Latent Image to Developed Image in Model EUV Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853583
ER  -