Characterization of Coplanar Waveguide on Epitaxial Layers
Dylan F. Williams, J. M. Belquin, Alain Spisser, Alain Cappy, G. Dambrine
We examine the effect of thin AlInAs/GaInAs epitaxial layers on the propagation of electrical signals in coplanar waveguide transmission lines fabricated on semi-insulating indium phosphide substrates. We show that argon isolation implants effectively reduce conduction losses in these layers to negligible levels at radio, microwave, and millimeter-wave frequencies.
, Belquin, J.
, Spisser, A.
, Cappy, A.
and Dambrine, G.
Characterization of Coplanar Waveguide on Epitaxial Layers, Electronics Letters, [online], https://doi.org/10.1049/el:19970969
(Accessed December 10, 2023)